Vandervorst, WilfriedWilfriedVandervorstEyben, PierrePierreEybenPolspoel, WouterWouterPolspoelMody, JayJayModyGilbert, MatthieuMatthieuGilbertKoelling, SebastianSebastianKoelling2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16425Nanoscale analysis of planar and 3D-Si-structuresOral presentation