Rapid investigation of nanocrystalline diamond vibrating membranes with a stroboscopic interferometer

Francis, LaurentLaurentFrancisKromka, AlexanderAlexanderKromkaSteinmuller-Nethl, DorisDorisSteinmuller-NethlBertrand, PatrickPatrickBertrandVan Hoof, ChrisChrisVan Hoof2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8919Rapid investigation of nanocrystalline diamond vibrating membranes with a stroboscopic interferometerProceedings paper