Material aspects and challenges for SOI FinFET integration

Van Dal, MarkMarkVan DalVellianitis, GeorgiosGeorgiosVellianitisDuffy, RayRayDuffyPawlak, BartekBartekPawlakLai, Li-ShyueLi-ShyueLaiHikavyy, AndriyAndriyHikavyyCollaert, NadineNadineCollaertJurczak, GosiaGosiaJurczakLander, RobRobLander2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14621Material aspects and challenges for SOI FinFET integrationMeeting abstract