The impact of ultra thin ALD TiN metal gate on low frequency noise of CMOS transistors

Mercha, AbdelkarimAbdelkarimMerchaSinganamalla, RaghunathRaghunathSinganamallaSubramanian, VaidyVaidySubramanianSimoen, EddyEddySimoenSansen, WillyWillySansenGroeseneken, GuidoGuidoGroesenekenDe Meyer, KristinKristinDe MeyerDecoutere, StefaanStefaanDecoutere2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12571The impact of ultra thin ALD TiN metal gate on low frequency noise of CMOS transistorsProceedings paper