Guerenneur, AnaisAnaisGuerenneurKouznetsov, DmitryDmitryKouznetsovNarducci, DanieleDanieleNarducciLuciano, FedericaFedericaLucianoSun, XiaoXiaoSunVan Dorpe, PolPolVan DorpeCiubotaru, FlorinFlorinCiubotaruAdelmann, ChristophChristophAdelmann2024-11-182024-08-082024-11-1820240957-0233WOS:001281447400001https://imec-publications.be/handle/20.500.12860/44281Equivalent circuit fitting method for microwave characterisation of low-k dielectric thin filmsJournal article10.1088/1361-6501/ad6342WOS:001281447400001RFPERMITTIVITYCAPACITANCE