Silicon nanophotonic wire structures fabricated by 193nm optical lithography

Selvaraja, ShankarShankarSelvarajaJaenen, PatrickPatrickJaenenBeckx, StephanStephanBeckxBogaerts, WimWimBogaertsDumon, PieterPieterDumonVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-162021-10-162007-10https://imec-publications.be/handle/20.500.12860/12875Silicon nanophotonic wire structures fabricated by 193nm optical lithographyProceedings paper