Hao, H. L.H. L.HaoWu, L. K.L. K.WuShen, W. Z.W. Z.ShenDekkers, HaroldHaroldDekkers2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12245Origin of visible luminescence in hydrogenated amorphous silicon nitrideJournal article