Effect of Al203 morphology on the erase saturation performance in SANOS-type memory cells

Cacciato, AntonioAntonioCacciatoFurnemont, ArnaudArnaudFurnemontBreuil, LaurentLaurentBreuilDe Vos, JoeriJoeriDe VosHaspeslagh, LucLucHaspeslaghVan Houdt, JanJanVan Houdt2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11825Effect of Al203 morphology on the erase saturation performance in SANOS-type memory cellsProceedings paper