Wu, Ming FangMing FangWuDe Wachter, JoJoDe WachterVan Bavel, MiekeMiekeVan BavelPattyn, H.H.PattynLangouche, G.G.LangoucheVanhellemont, JanJanVanhellemontBender, HugoHugoBenderTemst, K.K.TemstBruynseraede, Y.Y.Bruynseraede2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/468Ion beam synthesis of buried CoxNi1-xSi2 layers in siliconProceedings paper