O'Mahony, A.A.O'MahonyO'Connor, E.E.O'ConnorLong, R.R.LongThomas, K.K.ThomasPovey, I.M.I.M.PoveyHurley, P.K.P.K.HurleyPemble, M.E.M.E.PembleBrennan, B.B.BrennanHughes, G.G.HughesBrammertz, GuyGuyBrammertzAfanas'ev, V.V.V.V.Afanas'ev2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14251Atomic layer deposition of HfO2 thin films on InxGa1-xAsOral presentation