Towards the understanding of resistive contrast imaging in in situ dielectric breakdown studies using a nanoprober setup

Lambrinou, KonstantzaKonstantzaLambrinouHantschel, ThomasThomasHantschelArstila, KaiKaiArstilaKleindiek, StephanStephanKleindiekRummel, AndreasAndreasRummelTokei, ZsoltZsoltTokeiCroes, KristofKristofCroesPantouvaki, MariannaMariannaPantouvakiCzarnecki, PiotrPiotrCzarneckiDe Wolf, IngridIngridDe WolfVandervorst, WilfriedWilfriedVandervorst2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17426Towards the understanding of resistive contrast imaging in in situ dielectric breakdown studies using a nanoprober setupProceedings paper