Bernard, SophieSophieBernardMiller, AndyAndyMillerDuval, FabriceFabriceDuvalPepper, V.V.PepperBraggin, J.J.Braggin2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18556Impact of using filtration on global and local uniformity of spin on glue materialsProceedings paper