Rathore, AshishAshishRathorePollentier, IvanIvanPollentierKumar, Sunkuru S.Sunkuru S.KumarDe Simone, DaniloDaniloDe SimoneDe Gendt, StefanStefanDe Gendt2023-01-192021-11-022023-01-1920211932-5150WOS:000703599200017https://imec-publications.be/handle/20.500.12860/37470Feasibility of unzipping polymer polyphthalaldehyde for extreme ultraviolet lithographyJournal article10.1117/1.JMM.20.3.034602WOS:000703599200017RESIST MATERIALSDESIGN