Machkaoutsan, VladimirVladimirMachkaoutsanVerheyen, PeterPeterVerheyenBauer, M.M.BauerZhang, Y.Y.ZhangKoelling, SebastianSebastianKoellingFranquet, AlexisAlexisFranquetVanormelingen, KoenKoenVanormelingenLoo, RogerRogerLooKim, C.S.C.S.KimLauwers, AnneAnneLauwersHoriguchi, NaotoNaotoHoriguchiKerner, ChristophChristophKernerHoffmann, ThomasThomasHoffmannGranneman, E.E.GrannemanVandervorst, WilfriedWilfriedVandervorstAbsil, PhilippePhilippeAbsilThomas, S.G.S.G.Thomas2021-10-182021-10-1820100167-9317https://imec-publications.be/handle/20.500.12860/17543Electrical demonstration of thermally stable Ni silicides on Si1-xCx epitaxial layersJournal articlehttp://dx.doi.org/10.1016/j.mee.2009.06.019