Boher, P.P.BoherDefranaoux, C.C.DefranaouxBender, HugoHugoBender2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7235HfO2, Al2O3 and HfAlOx high-k dielectrics characterized by VUV spectroscopic ellipsometryOral presentation