On the formation of silicides on polyrunners with topography by a two-step silicidation process

Jonckx, FrankyFrankyJonckxVerbeeck, RitaRitaVerbeeckDeweerdt, BrunoBrunoDeweerdtMaex, KarenKarenMaex2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/697On the formation of silicides on polyrunners with topography by a two-step silicidation processJournal article