Brissonneau, VincentVincentBrissonneauKoo, Il GyoIl GyoKooHosseini, MaryamMaryamHosseiniBatuk, DmitryDmitryBatukVeloso, AnabelaAnabelaVelosoMannaert, GeertGeertMannaertLazzarino, FredericFredericLazzarino2024-08-082024-06-062024-08-082024978-1-5106-7222-20277-786XWOS:001223585400002https://imec-publications.be/handle/20.500.12860/43988Active area patterning for CFET - Nanosheet etchProceedings paper10.1117/12.3012322978-1-5106-7223-9WOS:001223585400002