Electrical performance comparison of embedded Si1-xGex source/drain junctions processed in 200 mm and 300 mmEpi-reactors

Bargallo Gonzalez, MireiaMireiaBargallo GonzalezSimoen, EddyEddySimoenHikavyy, AndriyAndriyHikavyyVerheyen, PeterPeterVerheyenLoo, RogerRogerLooCaymax, MattyMattyCaymaxMachkaoutsan, VladimirVladimirMachkaoutsanTomasini, P.P.TomasiniThomas, S.G.S.G.ThomasWise, R.R.WiseClaeys, CorCorClaeys2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13341Electrical performance comparison of embedded Si1-xGex source/drain junctions processed in 200 mm and 300 mmEpi-reactorsProceedings paper