Advanced PECVD SiCOH low-k films with low dielectric constant and/or high Young�s modulus

Verdonck, PatrickPatrickVerdonckWang, CongCongWangSouriau, LaurentLaurentSouriauVanstreels, KrisKrisVanstreelsBaklanov, MikhaïlMikhaïlBaklanov2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23326Advanced PECVD SiCOH low-k films with low dielectric constant and/or high Young�s modulusMeeting abstract