Investigation on the drying dynamics of millimetric water droplets: source of watermarks on silicon wafers

Belmiloud, NaserNaserBelmiloudMertens, PaulPaulMertensTamaddon, Amir-HosseinAmir-HosseinTamaddonStruyf, HerbertHerbertStruyf2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18544Investigation on the drying dynamics of millimetric water droplets: source of watermarks on silicon wafersMeeting abstract