To bake or not to bake... : the role of prebake in the EUV resist process

Pollentier, IvanIvanPollentierRathore, AshishAshishRathoreGupta, MihirMihirGuptaDe Simone, DaniloDaniloDe SimoneSuh, Hyo SeonHyo SeonSuh2023-06-142022-09-082022-11-072022-11-252023-06-142022-05-25978-1-5106-4985-90277-786XWOS:000844546500006https://imec-publications.be/handle/20.500.12860/40368To bake or not to bake... : the role of prebake in the EUV resist processProceedings paper10.1117/12.2616094978-1-5106-4986-6WOS:000844546500006Electrical & electronic engineering