Neimash, V. B.V. B.NeimashPuzenko, O. O.O. O.PuzenkoKabaldin, O. M.O. M.KabaldinKraitchinskii, A. M.A. M.KraitchinskiiKras'ko, M. M.M. M.Kras'koClaeys, CorCorClaeysSimoen, EddyEddySimoen2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3695The nature of precursors for the thermal donor formation in siliconProceedings paper