Meynen, HermanHermanMeynenVanden Bulcke, MathieuMathieuVanden BulckeGonzalez, MarioMarioGonzalezHarkness, BrianBrianHarknessGardner, GeoffGeoffGardnerSudbury-Holtschlag, JoanJoanSudbury-HoltschlagVandevelde, BartBartVandeveldeWinters, ChristopheChristopheWintersBeyne, EricEricBeyne2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9302Ultra low stress and low temperature patternable silicone materials for applications within microelectronicsJournal article