Pieters, PhilipPhilipPietersBorzi, RaffaellaRaffaellaBorziWitvrouw, AnnAnnWitvrouw2021-10-152021-10-152004-09https://imec-publications.be/handle/20.500.12860/9432Business opportunities for poly-SiGe as post-CMOS MEMS integration technologyProceedings paper