Hantschel, ThomasThomasHantschelStephenson, RobertRobertStephensonTrenkler, ThomasThomasTrenklerDe Wolf, PeterPeterDe WolfVandervorst, WilfriedWilfriedVandervorst2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3488Characterization of silicon cantilevers with integrated pyramidal tips in atomic force microscopyProceedings paper