Loo, RogerRogerLooShimura, YosukeYosukeShimuraIke, ShinichiShinichiIkeVohra, AnuragAnuragVohraStoica, TomaTomaStoicaStange, DanielaDanielaStangeBuca, DanDanBucaKohen, DavidDavidKohenMargetis, JoeJoeMargetisTolle, JohnJohnTolle2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/31235Epitaxial GeSn: Impact of process conditions on material qualityOral presentationhttps://www.european-mrs.com/monolithic-and-heterogeneous-integration-advanced-materials-devices-silicon-emrs