De Raedt, WalterWalterDe RaedtBeccarini, GiuseppeGiuseppeBeccariniRogge, FrankFrankRoggeZiad, HocineHocineZiadBaert, KrisKrisBaert2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3369MEMS for RF applicationsOral presentation