Caymax, MattyMattyCaymaxDelhougne, RomainRomainDelhougneLoo, RogerRogerLooRies, MichaelMichaelRiesLuysberg, MartinaMartinaLuysberg2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10198Thin SiGe strain-relaxed buffer layers: carbon-induced relaxationProceedings paper