CMOS-compatible selective biofunctionalization using a patterned sacrificial layer approach

Ha, SeungkyuSeungkyuHaVos, RitaRitaVosVidal Cabanilles, MariaMariaVidal CabanillesMartens, KoenKoenMartensStakenborg, TimTimStakenborgVan Dorpe, PolPolVan DorpeJans, KarolienKarolienJans2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33073CMOS-compatible selective biofunctionalization using a patterned sacrificial layer approachOral presentationhttps://indico.fys.kuleuven.be/event/56/contributions/1742/contribution.pdf