Line-end gap measurement with YieldStar scatterometer: towards an OPC model calibration

Charley, Anne-LaureAnne-LaureCharleyLeray, PhilippePhilippeLerayCheng, ShauneeShauneeChengDusa, MirceaMirceaDusaChiou, T.-B.T.-B.ChiouFumar-Pici, A.A.Fumar-Pici2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20436Line-end gap measurement with YieldStar scatterometer: towards an OPC model calibrationProceedings paper