A novel multilayer inter-gate dielectric enabling up To 18V program / erase window for planar NAND flash

Breuil, LaurentLaurentBreuilLisoni, JuditJuditLisoniBlomme, PieterPieterBlommeVan den Bosch, GeertGeertVan den BoschVan Houdt, JanJanVan Houdt2021-10-212021-10-212013-05https://imec-publications.be/handle/20.500.12860/22082A novel multilayer inter-gate dielectric enabling up To 18V program / erase window for planar NAND flashProceedings paper