Doubling or quadrupling MuGFET Fin integration scheme with higher pattern fidelity, lower CD variation and higher layout efficiency

Rooyackers, RitaRitaRooyackersAugendre, EmmanuelEmmanuelAugendreDegroote, BartBartDegrooteCollaert, NadineNadineCollaertNackaerts, AxelAxelNackaertsDixit, AbhisekAbhisekDixitVandeweyer, TomTomVandeweyerPawlak, BartekBartekPawlakErcken, MoniqueMoniqueErckenKunnen, EddyEddyKunnenDilliway, GabrielaGabrielaDilliwayLeys, FrederikFrederikLeysLoo, RogerRogerLooJurczak, GosiaGosiaJurczakBiesemans, SergeSergeBiesemans2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12804Doubling or quadrupling MuGFET Fin integration scheme with higher pattern fidelity, lower CD variation and higher layout efficiencyOral presentation