Vesters, YannickYannickVestersJiang, JingJingJiangYamamoto, HirokiHirokiYamamotoDe Simone, DaniloDaniloDe SimoneKozawa, TakahiroTakahiroKozawaDe Gendt, StefanStefanDe GendtVandenberghe, GeertGeertVandenberghe2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/32210Sensitizers in EUV chemically amplified resist: mechanism of sensitivity improvementProceedings paperhttps://doi.org/10.1117/12.2297627