Defect characterization after ESD stress: merging TLP and Pulsed-IV techniques

Linten, DimitriDimitriLintenJi, ZhigangZhigangJiBoschke, RomanRomanBoschkeHellings, GeertGeertHellingsChen, Shih-HungShih-HungChenScholz, MirkoMirkoScholzAlian, AliRezaAliRezaAlianCollaert, NadineNadineCollaertThean, AaronAaronThean2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25566Defect characterization after ESD stress: merging TLP and Pulsed-IV techniquesMeeting abstract