Schulze, AndreasAndreasSchulzeProkhodtseva, AnnaAnnaProkhodtsevaVystavel, TomasTomasVystavelGachet, DavidDavidGachetBerney, JeanJeanBerneyLoo, RogerRogerLooVandervorst, WilfriedWilfriedVandervorstCaymax, MattyMattyCaymax2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27287Seeing the invisible: metrology for extended crystalline defects in beyond silicon semiconductorsProceedings paper