Origin of defect in directed self-assembly of block copolymers using feature multiplication

Rincon Delgadillo, PaulinaPaulinaRincon DelgadilloHarukawa, RyotoRyotoHarukawaParnell, DoniDoniParnellLee, Yu-tsungYu-tsungLeeChan, BTBTChanLin, GuanyangGuanyangLinCao, YiYiCaoNagaswami, VenkatVenkatNagaswamiSomervell, MarkMarkSomervellNafus, KathleenKathleenNafusGronheid, RoelRoelGronheidNealey, PaulPaulNealey2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22998Origin of defect in directed self-assembly of block copolymers using feature multiplicationProceedings paper