Opto-Mechanical Ultrasound Sensor based on Sensitive Silicon-Photonic Split Rib-type Waveguide

Westerveld, WouterWouterWesterveldMahmud Ul Hasan, Hasan MDHasan MDMahmud Ul HasanJansen, RoelofRoelofJansenRottenberg, XavierXavierRottenbergSeveri, SimoneSimoneSeveriRochus, VeroniqueVeroniqueRochus2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/34437Opto-Mechanical Ultrasound Sensor based on Sensitive Silicon-Photonic Split Rib-type WaveguideProceedings paperhttps://www.osapublishing.org/abstract.cfm?URI=CLEO_Europe-2019-ck_6_5