De Coster, J.J.De CosterTilmans, HarrieHarrieTilmansHameyer, K.K.HameyerPuers, BobBobPuers2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6184Mechanical design of RF-MEMS capacitive switchesProceedings paper