Current understanding and modeling of B diffusion and activation anomalies in preamporphized ultra-shallow junctions

Colombeau, B.B.ColombeauSmith, A.J.A.J.SmithCowern, N.E.B.N.E.B.CowernCristiano, F.F.CristianoClaverie, A.A.ClaverieDuffy, RayRayDuffyPawlak, BartekBartekPawlakOrtiz, C.J.C.J.OrtizPichler, P.P.PichlerLampin, E.E.LampinZechner, C.C.Zechner2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8712Current understanding and modeling of B diffusion and activation anomalies in preamporphized ultra-shallow junctionsProceedings paper