The fate of the (reactive) primary ion: sputtering and desorption

Vandervorst, WilfriedWilfriedVandervorstJanssens, TomTomJanssensBerghmans, BartBartBerghmansHuyghebaert, CedricCedricHuyghebaert2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/13125The fate of the (reactive) primary ion: sputtering and desorptionProceedings paper