Birant, GizemGizemBirantRossi, ChristianChristianRossiCzech, JanJanCzechMarchal, WouterWouterMarchalBrammertz, GuyGuyBrammertzAernouts, TomTomAernoutsColombara, DiegoDiegoColombarade Wild, JessicaJessicade WildVermang, BartBartVermang2025-03-252024-11-242025-03-2520242045-2322WOS:001352487800025https://imec-publications.be/handle/20.500.12860/44838Pop the bubbles and let the current flow: mechanochemistry of micron and nano-sized openings in dielectric layersJournal article10.1038/s41598-024-78919-wWOS:001352487800025DEPOSITIONMEDLINE:39521833