Fabrication technique of a compressible biocompatible interconnect using a thin film transfer process

Aarts, ArnoArnoAartsSrivannavit, OOSrivannavitWise, K.D.K.D.WiseYoon, E.E.YoonPuers, BobBobPuersVan Hoof, ChrisChrisVan HoofPereira Neves, HerculesHerculesPereira Neves2021-10-192021-10-1920110960-1317https://imec-publications.be/handle/20.500.12860/18437Fabrication technique of a compressible biocompatible interconnect using a thin film transfer processJournal articlehttp://iopscience.iop.org/0960-1317/21/7/074012/pdf/0960-1317_21_7_074012.pdf