Device architectures and their integration challenges for 1x nm node: FinFETs and high mobility channel

Horiguchi, NaotoNaotoHoriguchiZschaetzsch, GerdGerdZschaetzschSasaki, YuichiroYuichiroSasakiKambham, Ajay KumarAjay KumarKambhamTogo, MitsuhiroMitsuhiroTogoCho, Moon JuMoon JuChoRagnarsson, Lars-AkeLars-AkeRagnarssonHellings, GeertGeertHellingsMitard, JeromeJeromeMitardFranco, JacopoJacopoFrancoEneman, GeertGeertEnemanWitters, LiesbethLiesbethWittersWaldron, NiamhNiamhWaldronLin, DennisDennisLinPantisano, LuigiLuigiPantisanoCollaert, NadineNadineCollaertVandervorst, WilfriedWilfriedVandervorstThean, AaronAaronThean2021-10-202021-10-202012-09https://imec-publications.be/handle/20.500.12860/20823Device architectures and their integration challenges for 1x nm node: FinFETs and high mobility channelProceedings paper