High-Q inductors and transmission lines on 20O.cm Si using wafer-level packaging technology

Carchon, GeertGeertCarchonSun, XiaoXiaoSunDe Raedt, WalterWalterDe Raedt2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7283High-Q inductors and transmission lines on 20O.cm Si using wafer-level packaging technologyProceedings paper