Defect localization in 3-D TSV structures by differential light-induced capacitance alteration

Jacobs, Kristof J.P.Kristof J.P.JacobsStucchi, MicheleMicheleStucchiAfanasiev, ValeriValeriAfanasievGonzalez, MarioMarioGonzalezCroes, KristofKristofCroesDe Wolf, IngridIngridDe WolfBeyne, EricEricBeyne2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30947Defect localization in 3-D TSV structures by differential light-induced capacitance alterationMeeting abstract