Si passivation in Ge pMOSFETS: further developments and understanding

Caymax, MattyMattyCaymaxLeys, FrederikFrederikLeysMitard, JeromeJeromeMitardMartens, KoenKoenMartensYang, LijunLijunYangPourtois, GeoffreyGeoffreyPourtoisVandervorst, WilfriedWilfriedVandervorstLoo, RogerRogerLooMeuris, MarcMarcMeuris2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13488Si passivation in Ge pMOSFETS: further developments and understandingMeeting abstract