Trompoukis, ChristosChristosTrompoukisEl Daif, OunsiOunsiEl DaifVerdonck, PatrickPatrickVerdonckNiesen, BjoernBjoernNiesenBen Yaala, MarwaMarwaBen YaalaDepauw, ValerieValerieDepauwGordon, IvanIvanGordonPoortmans, JefJefPoortmans2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23190Crystal orientation dependent anisotropic dry silicon etchingMeeting abstract