Zhao, ChaoChaoZhaoRoebben, G.G.RoebbenHeyns, MarcMarcHeynsVan der Biest, O.O.Van der Biest2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5879Crystallization and tetragonal-monoclinic transformation in ZrO2 and HfO2 dielectric thin filmsOral presentation