Checking design conformance and optimizing manufacturability using automated double-patterning decomposition

Cork, Christopher M.Christopher M.CorkWard, BrianBrianWardBarnes, Levi D.Levi D.BarnesPainter, BenBenPainterLucas, KevinKevinLucasLuk-Pat, GerryGerryLuk-PatWiaux, VincentVincentWiauxVerhaegen, StafStafVerhaegenMaenhoudt, MireilleMireilleMaenhoudt2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13556Checking design conformance and optimizing manufacturability using automated double-patterning decompositionProceedings paper