Rottenberg, XavierXavierRottenbergJansen, HenriHenriJansenFiorini, PaoloPaoloFioriniDe Raedt, WalterWalterDe RaedtTilmans, HarrieHarrieTilmans2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6775Novel RF-MEMS capacitive switching structuresProceedings paper